Substrate Size: 100mm and 150mm.

Allowed Materials: Tube 1: Metallized silicon, SiN, SiO
                              Tube 2 and tube 3: Clean Silicon

Forbidden Materials: Substrates: everything other than silicon (except tube 1)

Tubes in oxidation stack:

• OX4
• OX3
• OX2
• OX1

Gases N2, O2, H2, Bubbler TRANS-LC (trans 1,2-Dichloroethen)