Picture of HMDS Desiccator
Current status:
AVAILABLE
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Description

Approved materials : Semiconductor wafers and chips,

Glass wafers

Details
Tool name:
HMDS Desiccator
Area/room:
M2 F8 Lithography
Category:
Lithography
Manufacturer:
nn
Model:
nn
Process info

Approved use : Treatment of samples to to improve resist adhesion

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Instructors

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