Picture of Glovebox ALD Precursors
Current status:
AVAILABLE
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The glovebox is operated exceptionally by Aalto Nanofab, its use is strictly limited to filling of ALD containers with precursors.

Any other use is fully forbidden!

No user trainings are provided on the tool.

 

Tool name:
Glovebox ALD Precursors
Area/room:
[Not defined]
Category:
CVD & ALD
Manufacturer:
Innovative Technology
Model:
PureLab HE 21

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