Tools
All tools
Tool status
Info
General documents
Sitemap
User access
Login
No access?
Apply for access
here...
Login
U
sername:
P
assword:
Forgot your password?
Wafer spinner POLOS (1G 22)
Current status:
AVAILABLE
Book
|
Log
|
Show/Collapse all
Responsibles
Files
You must be logged in to view files.
Description
Details
Tool name:
Wafer spinner POLOS
Area/room:
M2 G Lithography and BCB
Category:
Lithography
Manufacturer:
SPS
Model:
MCD200 NPP
Instructors & Licensed Users
Instructors
Licensed Users
Tool Modes
You must be logged in to view tool modes.
This may take a while...please wait.
×
User Information
Name:
Telephone:
Mobile:
E-mail:
University/Company:
Laboratory:
Send Message
Subject:
Message:
Send