Q240 is a microwave quartz chamber photo-resist strip system.
Performance: 25 x 6 inch wafers per hour. 25 x 8 inch wafer conversion is available.
Process Conditions and Specifications:
25 x 6 inch wafers or 25 x 8 inch wafers, vacuum gauge 10 mbar, 1150W Magnetron (2.45 GHz), automatic pressure control APC valve.
Photoresist strip: O2 150 sccm, μ-wave power 1150 W, 0.65 mbar.
Allowed Materials: IC-clean materials only. Sample size: 6 to 8 inch wafers
Gases and Chemicals: O2, N2, Ar, CF4
Safety: Never operate the system if system rear panels are removed or the chamber door is open.
The effluents of all plasma processes should be considered to be toxic
Special Requirements: Quartz boats for 6 inch and 8 inch wafers.
Other Comments or Cautions: You are not allowed to change recipes without permission.