Picture of RCA 2
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RCA II cleaning for Si and Pyrex

Use a fresh solution: 7L DI water + 1.4L Hydrochloric Acid 37% (HCl) + 1.4L Hydrogen Peroxide 30% (H2O2)

• Process bath temperature: 80°C

• Substrate Size: 100 mm / 150 mm

• Allowed materials: Silicon wafers

• Forbidden materials: Non-silicon materials. All metals. All non-cleanroom-compatible materials

Tool name:
RCA 2
Area/room:
M2 F11 Wafers
Category:
Wet Processes
Manufacturer:
PM Plast
Model:
PM Plast

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