Profilm3D uses white light interferometry (WLI) to measure surface profiles and roughness from 0.05 µm - 10 mm. With PSI option the minimum vertical feature size is 0.001 µm.

Maximum measurement area: 2.0 mm x 1.7 mm. Larger areas can be measured with the grid option but no automatic stitching available.

Forbidden Materials: Soft sticky samples