Intended for laser micromachining of all materials

Laser source Spectra Physics Spirit 1040-16-SHG

• Available wavelengths 520 nm and 347 nm
• Max power at 520 nm 10.5W, 347 nm >4W; adjustable
• Pulse width <400 fs
• Repetition rate 415 kHz

Galvoscanner operates with 520 nm

• Max. Field size 55 mm x 55 mm, possible to use stitching
• Min. spot size 10 µm, actual spot size on sample depends on material and laser power.

Stage for 150 mm wafers

Alignment possible