Wafer level Vacuum prober : <10E-3 mBar ... 2 Bar. -40C ..+125C. Probe cards or standard RF-Probes. 6" or 8 " or stretch frame.
All automation can be directly controlled by an external computer, via TCP/IP interface. There are already automation routines for Labview or python. Similar automatic measurement routines that are in use at Cascade or Semiprobe station can be used here.