Picture of ATV furnace Mörkö
Current status:
AVAILABLE
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Only clean processes are allowed!
Any pyrolysis is strictly forbidden!
Allowed materials: Si, Ge, W, Mo, Nb, Ti, Zr, Hf, Al.
Forbidden materials: As, Se, Te, Cd, Pb, Zn, Fe, Ni, Co, Mn, Cu, Cr, In, Ga, Ag, Au, other noble metals, alkali metals, alkaline-earth metals, organic materials.
Maximum temperature: <1000C (preferably not higher than 995C).
Gasses connected: line 1: N2/O2 (one at a time only); line 2: Ar.
Rough vacuum, high vacuum, atmospheric pressure.
PC password: furnace
Control panel error acknowledgement password: 5264

Tool name:
ATV furnace Mörkö
Area/room:
M2 F10 Plasma
Category:
Furnace Processes
Manufacturer:
ATV
Model:
PEO-604

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