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SE-2000 Spectroscopic ellipsometer

Key features:

  • Wavelength range 190-2500 nm
  • Automatic goniometer
  • Automatic XY mapping stage
  • Substrate size up to 200 mm
  • Maximum sample height 10 mm
  • Camera for measurement spot visualization
  • Spot size:
    • Normal 3.5x14 mm at 75º incident angle
    • Microspot focusing optics 365x470 um at 75º incident angle
    • Ultramicrospot 60 um
  • Photometry capability (Reflection, transmission and diffusion)

 

General information regarding user training.

When submitting for training, please provide with the details of your application according to the check list below:

  • what are the materials of the films to be measured;
  • what are the materials of substrates;
  • what is the range of film thicknesses;
  • what are substrate dimensions and thickness;
  • is substrate a standard 4”, 6” or 8” wafer or smaller (cut) samples or chips;
  • single measurements or mapping required.

 

Tool name:
Spectroscopic Ellipsometer SE-2000
Area/room:
M2 F9 ALD
Category:
Characterization
Manufacturer:
Semilab
Model:
SE-2000

Instructors

Licensed Users

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