Picture of Laser marking station Trumpf
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Description

~~•Do the wafer marking after initial oxidation. The tool is classified as B. After marking -> Start clean (1D 09 Wet bench DCLEAN 2) before final RCA cleaning

Details
Tool name:
Laser marking station Trumpf
Area/room:
M1 Outer Corridor
Category:
Other processes
Manufacturer:
Trumpf
Model:
TruMark Station 5000
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