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Developer Spinner LabSpin (2F08 28)
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AVAILABLE
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Description
Spinner for development with MIF 726.
Available chucks for 100 mm and 150 mm wafers.
Details
Tool name:
Developer Spinner LabSpin
Area/room:
M2 F8 Lithography
Category:
Lithography
Manufacturer:
Süss
Model:
LabSpin6
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