Picture of Manual spinner apogee
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Description

Manual spinner for polyimide process.

 

 

 

Details
Tool name:
Manual spinner apogee
Area/room:
M2 G Lithography and BCB
Category:
Back-end Processes
Manufacturer:
Apogee
Model:
Apogee
Process info

 

Wafer size 6 and 8”

Wafer centering tool

Adjustable EBR and BSR. (Cyclopentanone)

Top rinse (IPA)

Developer (Cyclopentanone)

Connection for EFD syringe dispenser

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Tool Modes
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