Picture of Fume Hood TMAH
Current status:
AVAILABLE
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Description

TMAH

Approved materials : Silicon

Details
Tool name:
Fume Hood TMAH
Area/room:
M2 F12 Chemistry
Category:
Wet Processes
Manufacturer:
PMPlast
Model:
NN
Process info

Approved use : Anisotropic Silicon etching for 100mm wafers

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