Semi-automated probe station for single die and wafer level probing up to 200 mm wafers.
Advanced wafer mapping and computer vision features available in the MPI SENTIO software running on the prober computer.
4 pcs of micromanipulators for needle probing and 2 pcs of probe card holders.
Measurement instruments available: Keysight PXI rack with 5 pcs SMUs M9601A (and others, to be listed)
Measurement computer attached to local measurement network and VTT network.