Picture of RTA JetFirst 300C
Current status:
AVAILABLE
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Description

POSSIBLE PROCESSES :

  • Rapid thermal annealing (RTA)
  • Diffusion (RTD)
  • Cystrallization, Densification
  • Contact alloying

SYSTEM CHARACTERISTICS:

  • Temperature range: < 1100 °C . Thermocouple (TC) and Pyrometer (Pyro) control
Temperature Maximum duration
<800° C (TC) 3 h
900° C (TC) 60 min
1000° C (TC - Pyro) 12 min
1050° C (Pyro) 10 min
1100° C (Pyro) 5 min
  • Max. temperature ramp: 20 °C/s
  • Gases: N2 and H2
  • Vacuum: primary (x10-2 mbar) and turbo pump (x10-5 mbar)
  • 6' and 8' wafers (C class)
Details
Tool name:
RTA JetFirst 300C
Area/room:
M1 E Sputtering
Category:
Furnace Processes
Manufacturer:
EMC technologies
Model:
JetFirst 300C
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