Semi-automated probe station for single die and wafer level probing up to 300 mm wafers.
Advanced wafer mapping and computer vision features available in the MPI SENTIO software running on the prober computer.

Probe card holder for standard 4.5" probe cards with cable passthrough for the shielded chamber

2 pcs micromanipulators with:
2 pcs T26A GSG 125 microwave probes with 125 um pitch, up to 26 GHz.
OR
2 pcs high temperature Kelvin probes with 2.5 um tips.

Thermal chuck with -40 to 200 C temperature range.

MPI ShieldEnvironment: Ultra low noise shielding against EMI / RFI / Light, supporting down to fA level measurements