The MCV-2000S is a mercury-probe electrical characterization tool for semiconductor wafers and wafer pieces, supporting 20×20 mm samples up to 300 mm wafers. It performs fast, high-accuracy C-V and I-V measurements for dopant, resistivity, dielectric and interface quality evaluation.
Capabilities:
- Carrier density profiling, also for implantations and diffusions (Schottky & MOS C-V)
- Resistivity profiling for Si
- Dielectric C-V characterization (oxide thickness, k-value, etc.)
- I-V testing for dielectric integrity, leakage, breakdown and device parameters
- Interface trap density (Dit) measurement via Brews method
- Automatic multi-point wafer mapping
More details of measurement capabilities in the manual above.