Picture of SEM EBL Zeiss Supra 40
Current status:
AVAILABLE
Book | Log
Show/Collapse all

You must be logged in to view files.

Detectors: SE2, InLens

Voltage: 0.5 - 30 kV.

High current mode.

Allowed Materials: clean room compatible materials

Forbidden Materials:

All non-cleanroom-compatible materials, out gassing specimens, liquids

 

 

Tool name:
SEM EBL Zeiss Supra 40
Area/room:
M2 F13 Analysis Lab
Category:
Characterization
Manufacturer:
Zeiss
Model:
Zeiss Supra 40

Instructors

Licensed Users

You must be logged in to view tool modes.