BEAM COLUMNS:
-Ga-ion
-electron, 30kV ELSTAR FEG
GAS INJECTION:
-Pt (Trimethyl-1Methyl2,4-Cyclopentadien-1-YL-Platinum)
-W (TungstenHexaCarbonyl)
-Insulator/TEOS (Ethylsilicate)
-Delineation Etch (Trifluoroacedtamide)
ANALYSIS:
-SE, BSE, STEM
-EDX (EDAX)