Picture of Sputter Gold
Current status:
AVAILABLE
Book | Log
Show/Collapse all

You must be logged in to view files.


Process gases: Argon

Temperature range: Room temperature

The tool for metallization of SEM samples (up to 2").

Deposited thickness is limited by 100 nm due to low deposition rate. Thickness uniformity is poor.

Tool name:
Sputter Gold
Area/room:
Lab 1019 Thin Film
Category:
Sputtering
Manufacturer:
OPTON
Model:
OPTON

Varastossa 16.1.2014 / Paula. Siirretään ohutkalvolabraan, kun sputtereille on laitettu paikka, muutostyöt käynnissä.

Siirretty Ohutkalvolabraan. 14.4.14

Instructors

Licensed Users

You must be logged in to view tool modes.