Maximum resolution around 1 um. If you need high resolution images, this is not the tool for the job. Check the other SEMs.

Easy and fast to use SEM for quick checks: wire-bonds, fiber connections etc. The chamber pumping time is ~2min. Maximum sample size 2" wafer.

The system also comprises an EDX, but the resolution is low. Good for qualitative checks i.e. determining if your sample contains a certain element or not.

The tool is located in the XRD lab (4168).