Year of Manufacture and Installation:

2005 / 2005

Description:

Scanning probe microscope for measuring the nanoscale morphology of surfaces.

Key Features and Accessories:

Operating modes: Atomic force microscopy (AFM), scanning tunneling microscopy (STM), lateral force microscopy (LFM), force modulation microscopy (FMM), electrical SPM imaging (SKM, SRI, SCM, EFM), magnefic force microscopy (MFM) and oxidation & force lithography.

Key Specifications:

• Maximum scanning area 100 µm 

• Vertical resolution 3 Å 

• Diameter of probe tip 10-100 nm

Substrate Size:

Sample size ca. 10 mm x 20 mm (max. smaller dimension ~12 mm)

Scanning head configuration for AFM, LFM, FMM and MFM: Maximum wafer size 100mm (only center of the max-size wafer can be measured). Vertical resolution for scanning head configuration 1 nm.

Allowed Materials:

Hard, non-sticky materials.

Forbidden Materials:

Sticky materials.

Availability and Cost:

Availability Class: F (Use allowed for all researchers with permission.) 

Price Category: Low