Picture of ALD reactor SUNALE R-150B
Current status:
AVAILABLE
Book | Log| 
Show/Collapse all

Responsibles
Files
You must be logged in to view files.
Description
  • ALD Al2O3, TiO2 and laminates thereof
  • Normal temperatures 110-300°C
  • Currently, use by VTT operators only
Details
Tool name:
ALD reactor SUNALE R-150B
Area/room:
M1 B Plasma Etching
Category:
CVD & ALD
Manufacturer:
Picosun
Model:
SUNALE R-150B
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
You must be logged in to view tool modes.